Granted Patent
Utility
US 6,307,682 · App. 09/504,719
Zoom illumination system for use in photolithography
Inventors:
Jeffrey M. Hoffman, Joseph Marshall Kunick, Mark Oskotsky, Lev Ryzhikov
Patented Case
View Patent ↗
Granted: Oct 23, 2001
Filed: Feb 16, 2000
Inventors
Jeffrey M. Hoffman
Joseph Marshall Kunick
Mark Oskotsky
Lev Ryzhikov
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.