Granted Patent
Utility
US 6,307,688 · App. 09/444,815
Optical system, in particular projection-illumination unit used in microlithography
Inventors:
Erich Merz, Jochen Becker
Patented Case
View Patent ↗
Granted: Oct 23, 2001
Filed: Nov 22, 1999
Inventors
Erich Merz
Jochen Becker
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.