Granted Patent
Utility
US 6,307,913 · App. 09/429,738
Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation
Inventors:
Richard M. Foster, Edmond Turcu, Jose Sasian, Harry Rieger, James Morris
Patented Case
View Patent ↗
Granted: Oct 23, 2001
Filed: Oct 27, 1999
Inventors
Richard M. Foster
Edmond Turcu
Jose Sasian
Harry Rieger
James Morris
Assignee (at issue)
JMAR Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.