Granted Patent
Utility
US 6,312,574 · App. 09/157,408
Target, magnetron source with said target and process for producing said target
Inventors:
Hans Quaderer, Juergen Weichart
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: Sep 21, 1998
Inventors
Hans Quaderer
Juergen Weichart
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.