Granted Patent
Utility
US 6,312,855 · App. 09/444,466
Three-phase phase shift mask
Inventors:
Jiunn-Ren Hwang, I-Hsiung Huang, Anseime Chen
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: Nov 22, 1999
Inventors
Jiunn-Ren Hwang
I-Hsiung Huang
Anseime Chen
Assignee (at issue)
WINBOND ELECTRONICS CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.