Granted Patent
Utility
US 6,313,016 · App. 09/469,752
Method for producing epitaxial silicon germanium layers
Inventors:
Horst Kibbel, Jessica Kuchenbecker
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: Dec 22, 1999
Inventors
Horst Kibbel
Jessica Kuchenbecker
Assignee (at issue)
Daimlerchrysler AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.