Granted Patent
Utility
US 6,313,039 · App. 09/481,050
Chemical mechanical polishing composition and process
Inventors:
Robert J. Small, Laurence McGhee, David J. Maloney, Maria Peterson
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: Jan 11, 2000
Inventors
Robert J. Small
Laurence McGhee
David J. Maloney
Maria Peterson
Assignee (at issue)
EKC Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.