Granted Patent
Utility
US 6,313,466 · App. 09/310,470
Method for determining nitrogen concentration in a film of nitrided oxide material
Inventors:
Christopher S. Olsen, Subhas Bothra
Patented Case
View Patent ↗
Granted: Nov 6, 2001
Filed: May 12, 1999
Inventors
Christopher S. Olsen
Subhas Bothra
Assignee (at issue)
Philips Electronics North America Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.