IP Library Granted Patent US 6,315,423
Granted Patent Utility
US 6,315,423 · App. 09/352,835

Micro machined mirror

Inventors: Duli Yu, Lianzhong Yu, Howard D. Goldberg, Martin Schmidt, Robert Ried
Patented Case View Patent ↗
Granted: Nov 13, 2001 Filed: Jul 13, 1999
Inventors
Duli Yu
Lianzhong Yu
Howard D. Goldberg
Martin Schmidt
Robert Ried
Assignee (at issue)
Input/Output, Inc.

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Quick Facts
Patent No.
US 6,315,423
App. No.
09/352,835
Filed
1999-07-13
Granted
2001-11-13
Kind
A