Granted Patent
Utility
US 6,315,879 · App. 09/653,444
Modular deposition system having batch processing and serial thin film deposition
Inventors:
Hudson Washburn, Jarrett L. Hamilton
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Aug 31, 2000
Inventors
Hudson Washburn
Jarrett L. Hamilton
Assignee (at issue)
United Module Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.