Granted Patent
Utility
US 6,316,365 · App. 09/728,779
Chemical-mechanical polishing method
Inventors:
Shumin Wang, Homer Chou
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Dec 1, 2000
Inventors
Shumin Wang
Homer Chou
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.