Granted Patent
Utility
US 6,316,366 · App. 09/503,996
Method of polishing using multi-oxidizer slurry
Inventors:
Vlasta Brusic Kaufman, Shumin Wang
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Feb 14, 2000
Inventors
Vlasta Brusic Kaufman
Shumin Wang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.