Granted Patent
Utility
US 6,316,796 · App. 08/652,867
Single crystal silicon sensor with high aspect ratio and curvilinear structures
Inventors:
Kurt E. Petersen, Nadim Maluf, Wendell McCulley, John Logan, Erno Klaasen, Jan Mark Noworolski
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: May 23, 1996
Inventors
Kurt E. Petersen
Nadim Maluf
Wendell McCulley
John Logan
Erno Klaasen
Jan Mark Noworolski
Assignee (at issue)
Lucas NovaSensor
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.