Granted Patent
Utility
US 6,316,839 · App. 09/610,643
Mask repattern process
Inventor:
Warren M. Farnworth
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Jun 28, 2000
Inventor
Warren M. Farnworth
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.