Granted Patent
Utility
US 6,317,447 · App. 09/490,835
Electric discharge laser with acoustic chirp correction
Inventors:
William N. Partlo, Igor V. Fomenkov, Jean-Marc Hueber, Zsolt Bor, Eckehard D. Onkels, Michael C. Cates, Richard C. Ujazdowski, Vladimir B. Fleurov, Dmitri V. Gaidarenko
Patented Case
View Patent ↗
Granted: Nov 13, 2001
Filed: Jan 25, 2000
Inventors
William N. Partlo
Igor V. Fomenkov
Jean-Marc Hueber
Zsolt Bor
Eckehard D. Onkels
Michael C. Cates
Richard C. Ujazdowski
Vladimir B. Fleurov
Dmitri V. Gaidarenko
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.