Granted Patent
Utility
US 6,318,957 · App. 09/256,743
Method for handling of wafers with minimal contact
Inventors:
Paul R. Carr, Paul Jacobson, James Kusbel, James S. Roundy, Ravinder Aggarwal, Ivo Raaijmakers, Rod Lenz, Nilesh Rajbharti
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Feb 24, 1999
Inventors
Paul R. Carr
Paul Jacobson
James Kusbel
James S. Roundy
Ravinder Aggarwal
Ivo Raaijmakers
Rod Lenz
Nilesh Rajbharti
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.