Granted Patent
Utility
US 6,319,096 · App. 09/440,525
Composition and method for planarizing surfaces
Inventors:
Brian L. Mueller, James A. Dirksen
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Nov 15, 1999
Inventors
Brian L. Mueller
James A. Dirksen
Assignees (at issue)
Cabot Corporation
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.