Granted Patent
Utility
US 6,319,556 · App. 09/437,069
Reflective surface for CVD reactor walls
Inventors:
Aage Olsen, Michael Halpin
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Nov 9, 1999
Inventors
Aage Olsen
Michael Halpin
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.