Granted Patent
Utility
US 6,319,639 · App. 09/634,329
Method for making a photomask with multiple absorption levels
Inventor:
Alan R. Reinberg
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Aug 7, 2000
Inventor
Alan R. Reinberg
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.