Granted Patent
Utility
US 6,319,644 · App. 09/780,407
Methods of reducing proximity effects in lithographic processes
Inventors:
Christophe Pierrat, James Burdorf, William Baggenstoss, William A. Stanton
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Feb 12, 2001
Inventors
Christophe Pierrat
James Burdorf
William Baggenstoss
William A. Stanton
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.