Granted Patent
Utility
US 6,319,743 · App. 09/291,468
Method of making thin film piezoresistive sensor
Inventors:
Robert Marchant, Majid Fazeli
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Apr 14, 1999
Inventors
Robert Marchant
Majid Fazeli
Assignee (at issue)
Mykrolis Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.