Granted Patent
Utility
US 6,320,644 · App. 08/228,889
Reticle alignment system for use in lithography
Inventors:
Craig R. Simpson, Marc S. Lucas
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Apr 18, 1994
Inventors
Craig R. Simpson
Marc S. Lucas
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.