Granted Patent
Utility
US 6,320,663 · App. 09/513,324
Method and device for spectral measurements of laser beam
Inventor:
Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Nov 20, 2001
Filed: Feb 25, 2000
Inventor
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.