Granted Patent
Utility
US 6,322,672 · App. 09/522,561
Method and apparatus for milling copper interconnects in a charged particle beam system
Inventors:
Richard F. Shuman, Kathryn Noll, J. David Casey, Jr.
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: Mar 10, 2000
Inventors
Richard F. Shuman
Kathryn Noll
J. David Casey, Jr.
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.