Granted Patent
Utility
US 6,323,134 · App. 09/519,281
Plasma processing methods and apparatus
Inventor:
Oleg Siniaguine
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: Mar 7, 2000
Inventor
Oleg Siniaguine
Assignee (at issue)
Tru-Si Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.