Granted Patent
Utility
US 6,323,616 · App. 09/564,300
Self teaching robotic wafer handling system
Inventors:
Paul Sagues, Robert T. Wiggers, Sanjay K. Aggarwal, Kevin D. D'Souza, Nathan Harding
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: May 3, 2000
Inventors
Paul Sagues
Robert T. Wiggers
Sanjay K. Aggarwal
Kevin D. D'Souza
Nathan Harding
Assignee (at issue)
Berkeley Process Control, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.