Granted Patent
Utility
US 6,324,192 · App. 09/059,877
Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
Inventor:
Parviz Tayebati
Patented Case
View Patent ↗
Granted: Nov 27, 2001
Filed: Apr 14, 1998
Inventor
Parviz Tayebati
Assignee (at issue)
Coretek, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.