Granted Patent
Utility
US 6,326,262 · App. 09/651,492
Method for fabricating epitaxy layer
Inventors:
Dietmar Temmler, Herbert Benzinger, Wolfram Karcher, Catharina Pusch, Martin Schrems, Jurgen Faul
Patented Case
View Patent ↗
Granted: Dec 4, 2001
Filed: Aug 30, 2000
Inventors
Dietmar Temmler
Herbert Benzinger
Wolfram Karcher
Catharina Pusch
Martin Schrems
Jurgen Faul
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.