Granted Patent
Utility
US 6,326,283 · App. 09/519,908
Trench-diffusion corner rounding in a shallow-trench (STI) process
Inventors:
Victor Chiang Liang, Olivier Laparra, Mark Rubin
Patented Case
View Patent ↗
Granted: Dec 4, 2001
Filed: Mar 7, 2000
Inventors
Victor Chiang Liang
Olivier Laparra
Mark Rubin
Assignee (at issue)
VLSI Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.