Granted Patent
Utility
US 6,326,632 · App. 09/417,633
Particle-optical imaging system for lithography purposes
Inventors:
Herbert Buschbeck, Alfred Chalupka, Gertraud Lammer, Hans Loeschner, Gerhard Stengl
Patented Case
View Patent ↗
Granted: Dec 4, 2001
Filed: Oct 13, 1999
Inventors
Herbert Buschbeck
Alfred Chalupka
Gertraud Lammer
Hans Loeschner
Gerhard Stengl
Assignee (at issue)
IMS-Ionen Mikrofabrikationas Systeme
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.