Granted Patent
Utility
US 6,327,286 · App. 09/465,427
High speed magnetic modulator voltage and temperature timing compensation circuit
Inventors:
Richard M. Ness, William N. Partlo, Richard L. Sandstrom, David M. Johns
Patented Case
View Patent ↗
Granted: Dec 4, 2001
Filed: Dec 21, 1999
Inventors
Richard M. Ness
William N. Partlo
Richard L. Sandstrom
David M. Johns
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.