Granted Patent
Utility
US 6,327,793 · App. 09/531,912
Method for two dimensional adaptive process control of critical dimensions during spin coating process
Inventors:
Emir Gurer, Tom Zhong, John Lewellen, Eddie Lee
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Mar 20, 2000
Inventors
Emir Gurer
Tom Zhong
John Lewellen
Eddie Lee
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.