Granted Patent
Utility
US 6,327,863 · App. 09/627,579
Cryopump with gate valve control
Inventors:
Stephen J. Yamartino, Brett W. Allen, Carl H. Geden
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Jul 28, 2000
Inventors
Stephen J. Yamartino
Brett W. Allen
Carl H. Geden
Assignee (at issue)
Helix Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.