Granted Patent
Utility
US 6,328,768 · App. 08/958,157
Semiconductor device manufacturing line
Inventor:
Nahomi Ohta
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Oct 27, 1997
Inventor
Nahomi Ohta
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.