Granted Patent
Utility
US 6,328,803 · App. 08/805,018
Method and apparatus for controlling rate of pressure change in a vacuum process chamber
Inventors:
J. Brett Rolfson, Elton J. Hochhalter
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Feb 21, 1997
Inventors
J. Brett Rolfson
Elton J. Hochhalter
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.