Granted Patent
Utility
US 6,328,903 · App. 09/520,643
Surface-micromachined chain for use in microelectromechanical structures
Inventor:
George E. Vernon
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Mar 7, 2000
Inventor
George E. Vernon
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.