Granted Patent
Utility
US 6,329,261 · App. 09/550,097
Method for forming a shallow trench isolation structure
Inventor:
Koji Kishimoto
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Apr 14, 2000
Inventor
Koji Kishimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.