Granted Patent
Utility
US 6,329,271 · App. 09/588,244
Self-aligned channel implantation
Inventors:
Hiroyuki Akatsu, Yujun Li, Jochen Beintner
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Jun 6, 2000
Inventors
Hiroyuki Akatsu
Yujun Li
Jochen Beintner
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.