Granted Patent
Utility
US 6,330,261 · App. 09/271,041
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
Inventors:
Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior, Herve A. Besaucele, Richard G. Morton, Richard M. Ness, Peter Clarke Newman, William N. Partlo, Daniel A. Rothweil, Richard L. Sandstrom
Patented Case
View Patent ↗
Granted: Dec 11, 2001
Filed: Mar 17, 1999
Inventors
Toshihiko Ishihara
Thomas Patrick Duffey
John T. Melchior
Herve A. Besaucele
Richard G. Morton
Richard M. Ness
Peter Clarke Newman
William N. Partlo
Daniel A. Rothweil
Richard L. Sandstrom
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.