IP Library Granted Patent US 6,330,971
Granted Patent Utility
US 6,330,971 · App. 09/677,909

Radio frequency identification system and method for tracking silicon wafers

Inventors: Frank Mabry, James Rhodes
Patented Case View Patent ↗
Granted: Dec 18, 2001 Filed: Oct 3, 2000
Inventors
Frank Mabry
James Rhodes
Assignee (at issue)
MEMC Electronic Materials, Inc.

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Quick Facts
Patent No.
US 6,330,971
App. No.
09/677,909
Filed
2000-10-03
Granted
2001-12-18
Kind
A