IP Library Granted Patent US 6,334,754
Granted Patent Utility
US 6,334,754 · App. 09/338,310

Turbomolecular pump

Inventor: Takashi Kabasawa
Patented Case View Patent ↗
Granted: Jan 1, 2002 Filed: Jun 22, 1999
Inventor
Takashi Kabasawa
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,334,754
App. No.
09/338,310
Filed
1999-06-22
Granted
2002-01-01
Kind
B1