Granted Patent
Utility
US 6,335,280 · App. 08/783,815
Tungsten silicide deposition process
Inventor:
Cornelius A. van der Jeugd
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: Jan 13, 1997
Inventor
Cornelius A. van der Jeugd
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.