Granted Patent
Utility
US 6,335,783 · App. 09/424,575
Lithography system
Inventor:
Pieter Kruit
Patented Case
View Patent ↗
Granted: Jan 1, 2002
Filed: Jan 7, 2000
Inventor
Pieter Kruit
Assignee (at issue)
Technische Universiteit Delft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.