Granted Patent
Utility
US 6,337,027 · App. 09/410,166
Microelectromechanical device manufacturing process
Inventor:
Kurt D. Humphrey
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Sep 30, 1999
Inventor
Kurt D. Humphrey
Assignee (at issue)
Rockwell Science Center, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.