Granted Patent
Utility
US 6,337,247 · App. 09/487,411
Method of producing a vertical MOS transistor
Inventors:
Thomas Schulz, Thomas Äugle, Wolfgang Rosner, Lothar Risch
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Jan 18, 2000
Inventors
Thomas Schulz
Thomas Äugle
Wolfgang Rosner
Lothar Risch
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.