Granted Patent
Utility
US 6,337,263 · App. 09/492,654
Method for improving the quality of metal conductor tracks on semiconductor structures
Inventor:
Matthias Lehr
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Jan 27, 2000
Inventor
Matthias Lehr
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.