Granted Patent
Utility
US 6,337,723 · App. 09/247,455
Method for manufacturing a TFT-LCD using CF and H etching gas for etching organic insulator
Inventor:
Sung-Sik Bae
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Feb 10, 1999
Inventor
Sung-Sik Bae
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.