Granted Patent
Utility
US 6,338,052 · App. 09/104,108
Method for optimizing matching network of semiconductor process apparatus
Inventor:
Koon Ho Bae
Patented Case
View Patent ↗
Granted: Jan 8, 2002
Filed: Jun 25, 1998
Inventor
Koon Ho Bae
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.