Granted Patent
Utility
US 6,338,312 · App. 09/060,675
Integrated ion implant scrubber system
Inventors:
Michael W. Hayes, Mark Holst, Jose I. Arno
Patented Case
View Patent ↗
Granted: Jan 15, 2002
Filed: Apr 15, 1998
Inventors
Michael W. Hayes
Mark Holst
Jose I. Arno
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.