Granted Patent
Utility
US 6,338,744 · App. 09/481,573
Polishing slurry and polishing method
Inventors:
Yoshikuni Tateyama, Katsumi Yamamoto, Hiroshi Kato, Kazuhiko Hayashi, Hiroyuki Kono
Patented Case
View Patent ↗
Granted: Jan 15, 2002
Filed: Jan 11, 2000
Inventors
Yoshikuni Tateyama
Katsumi Yamamoto
Hiroshi Kato
Kazuhiko Hayashi
Hiroyuki Kono
Assignees (at issue)
TOKUYAMA CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.